Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > LS > 2023 > LM1F > LM1F.4

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using extreme ultraviolet, coherent diffractive imaging reflectometry

Michael Tanksalvala, Yuka Esashi, Christina L. Porter, Nicholas W. Jenkins, Bin Wang, Zhe Zhang, Galen P. Miley, Naoto Horiguchi, Sadegh Yazdi, Chen-Ting Liao, Michael Gerrity, Henry C. Kapteyn, and Margaret M. Murnane

Not Accessible

Your library or personal account may give you access

Abstract

A grand challenge in semiconductor metrology has been the nondestructive characterization 3D nanostructures and their multilayer structure, interfaces, and dopant concentrations. We combine extreme ultraviolet reflectometry with state-of-the-art ptychography imaging algorithms to achieve this goal.

© 2023 The Author(s)

PDF Article  |   Presentation Video
More Like This
Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light

Nicholas W. Jenkins, Michael Tanksalvala, Yuka Esashi, Christina L. Porter, Bin Wang, Naoto Horiguchi, Matthew N. Jacobs, Michael Gerrity, Henry C. Kapteyn, and Margaret M. Murnane
EW3A.4 Compact EUV & X-ray Light Sources (EUVXRAY) 2020

Coherent Diffraction Imaging of Buried Nanostructures in a Reflection Geometry with Extreme Ultraviolet Light

Christina L. Porter, Elisabeth R. Shanblatt, Dennis F. Gardner, Giulia F. Mancini, Robert M. Karl, Michael D. Tanksalvala, Charles S. Bevis, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
SM3R.5 CLEO: Science and Innovations (CLEO:S&I) 2016

Nanoscale Material-specific Imaging Using an Extreme Ultraviolet Table-top Light Source

Chang Liu, Wilhelm Eschen, Lars Loetgering, Daniel S. Penagos Molina, Robert Klas, Vittoria Schuster, Alexander Kirsche, Lutz Berthold, Alexander Iliou, Michael Steinert, Falk Hillmann, Michael Krause, Thomas Pertsch, Jens Limpert, and Jan Rothhardt
ch_6_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

View More...

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads

More Like This
Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light

Nicholas W. Jenkins, Michael Tanksalvala, Yuka Esashi, Christina L. Porter, Bin Wang, Naoto Horiguchi, Matthew N. Jacobs, Michael Gerrity, Henry C. Kapteyn, and Margaret M. Murnane
EW3A.4 Compact EUV & X-ray Light Sources (EUVXRAY) 2020

Coherent Diffraction Imaging of Buried Nanostructures in a Reflection Geometry with Extreme Ultraviolet Light

Christina L. Porter, Elisabeth R. Shanblatt, Dennis F. Gardner, Giulia F. Mancini, Robert M. Karl, Michael D. Tanksalvala, Charles S. Bevis, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
SM3R.5 CLEO: Science and Innovations (CLEO:S&I) 2016

Nanoscale Material-specific Imaging Using an Extreme Ultraviolet Table-top Light Source

Chang Liu, Wilhelm Eschen, Lars Loetgering, Daniel S. Penagos Molina, Robert Klas, Vittoria Schuster, Alexander Kirsche, Lutz Berthold, Alexander Iliou, Michael Steinert, Falk Hillmann, Michael Krause, Thomas Pertsch, Jens Limpert, and Jan Rothhardt
ch_6_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023

View More...
Quantitative Chemically-Specific Coherent Diffractive Imaging of Reactions and Diffusion at Buried Interfaces using a Tabletop EUV Nanoscope

Elisabeth R. Shanblatt, Christina L. Porter, Dennis F. Gardner, Giulia F. Mancini, Robert M. Karl, Michael D. Tanksalvala, Charles S. Bevis, Victor H. Vartanian, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
CT4C.1 Computational Optical Sensing and Imaging (COSI) 2016

High Numerical Aperture Reflection Mode Coherent Diffractive Imaging of Nano-Patterned Surfaces using a Tabletop Extreme Ultraviolet Source

Elisabeth R. Shanblatt, Bosheng Zhang, Dennis F. Gardner, Matthew D. Seaberg, Christina L. Porter, Robert M. Karl, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams
CW4E.4 Computational Optical Sensing and Imaging (COSI) 2015

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use