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Conferences > COSI > 2016 > CT4C > CT4C.1

Quantitative Chemically-Specific Coherent Diffractive Imaging of Reactions and Diffusion at Buried Interfaces using a Tabletop EUV Nanoscope

Elisabeth R. Shanblatt, Christina L. Porter, Dennis F. Gardner, Giulia F. Mancini, Robert M. Karl, Michael D. Tanksalvala, Charles S. Bevis, Victor H. Vartanian, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams

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Abstract

We demonstrate imaging of optically opaque nanostructures buried beneath a thick layer of aluminum using a tabletop extreme ultraviolet source. Our non-destructive technique uncovers interfacial diffusion and oxidation between layers, validated using destructive techniques.

© 2016 Optical Society of America

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