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High Numerical Aperture Reflection Mode Coherent Diffractive Imaging of Nano-Patterned Surfaces using a Tabletop Extreme Ultraviolet Source

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Abstract

Using an extreme-ultraviolet tabletop diffraction microscope, we demonstrate unprecedented resolution by imaging structures in an extended reflection mode. Titanium nano-patterns are reconstructed with a 40nm transverse resolution; surface variations are imaged with sub-nanometer axial resolution.

© 2015 Optical Society of America

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