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Conferences > CLEO_Europe > 2023 > ch_6 > ch_6_2
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper ch_6_2

Nanoscale Material-specific Imaging Using an Extreme Ultraviolet Table-top Light Source

Chang Liu, Wilhelm Eschen, Lars Loetgering, Daniel S. Penagos Molina, Robert Klas, Vittoria Schuster, Alexander Kirsche, Lutz Berthold, Alexander Iliou, Michael Steinert, Falk Hillmann, Michael Krause, Thomas Pertsch, Jens Limpert, and Jan Rothhardt

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Abstract

Microscopy using extreme ultraviolet (EUV) light offers high potential for a broad range of applications ranging from semiconductor metrology to biological imaging, thanks to its nanoscale resolution and excellent material contrast [1]. Especially, photon penetration in the spectral region below the Silicon L-edge (>12.4 nm wavelength) allows for the investigation of micrometer-thick samples.

© 2023 IEEE

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