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Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light

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Abstract

We present a versatile, ptychographic phase-sensitive imaging EUV reflectometer that can nondestructively image samples with spatial, depth and compositional resolution, with sensitivities to dopant levels and interface quality.

© 2020 The Author(s)

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