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Conferences > CLEO_SI > 2016 > SM3R > SM3R.5

Coherent Diffraction Imaging of Buried Nanostructures in a Reflection Geometry with Extreme Ultraviolet Light

Christina L. Porter, Elisabeth R. Shanblatt, Dennis F. Gardner, Giulia F. Mancini, Robert M. Karl, Michael D. Tanksalvala, Charles S. Bevis, Henry C. Kapteyn, Margaret M. Murnane, and Daniel E. Adams

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Abstract

We use reflection-mode ptychography CDI with HHG illumination to image copper nanostructures buried beneath 100nm of aluminum. Our technique yields absolute reflectivity images, allowing non-destructive detection of diffusion at the Al-Cu boundary, confirmed by Auger-Electron-Spectroscopy.

© 2016 Optical Society of America

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