Abstract

Magnesium oxide and magnesium oxyfluoride films were deposited by a combined HIPIMS/CFUBMS deposition technique with Mg targets at room temperature. In order to obtain better optical and mechanical properties, films were investigated under different duty cycles and CF₄ gas flow rates. The optical properties in deep ultraviolet range, microstructure, and crystalline structure, of magnesium oxide and magnesium oxyfluoride films have been studied. The magnesium oxyfluoride deposited with Ar 15 sccm O₂ 1 sccm and 0.4 sccm CF₄ had the lowest extinction coefficient (4×10^-4) and its refractive index was 1.66 at 200 nm.

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