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Effect of Ion Beam Figuring and Subsequent AR Coating Deposition on the Surface Absorption of CaF2 at 193nm

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Abstract

The CaF2 surface absorption at 193nm is investigated as function of surface treatment by different ion beam figuring (IBF) parameters using laser induced deflection (LID) technique. In comparison to standard pitch polishing, an enhanced surface absorption (subsurface damage) is observed. After subsequent AR coating deposition, however, total surface absorption of IBF treated samples does not exceed values obtained for pitch polished samples.

© 2016 Optical Society of America

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