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Al-based multilayer mirrors for Extreme UV applications

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Abstract

We will present recent advances in the design and deposition of Al-based multilayer mirrors for EUV applications. Periodic and aperiodic three material structures have been designed to provide high efficiency narrowband, dual-band and broadband mirrors. Applications to solar physics and to ultrafast dynamics with coherent EUV sources will be discussed.

© 2016 Optical Society of America

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