Abstract
Pattern-Integrated Interference Lithography (PIIL) couples interference lithography and imaging lithography to produce periodic microstructures with integrated functional elements in a single-exposure step. In this work, 2D-PIIL is reviewed and 3D-PIIL is simulated.
© 2013 Optical Society of America
PDF Article | Presentation VideoMore Like This
Matthieu C. R. Leibovici and Thomas K. Gaylord
FW1F.5 Frontiers in Optics (FiO) 2013
Shruthi K. Vadivel, Matthieu C. R. Leibovici, and Thomas K. Gaylord
FTh3D.6 Frontiers in Optics (FiO) 2017
Matthieu C. R. Leibovici and Thomas K. Gaylord
FW1A.4 Frontiers in Optics (FiO) 2014