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Conferences > CLEO_SI > 2021 > SF2A > SF2A.3

Dual-layer thick LPCVD SiN waveguides for low-loss photonics on 200 mm wafers

A. Marinins, J. Kjellman, C. Caer, T. David, X. Rottenberg, R. Jansen, and P. Soussan

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Abstract

We demonstrate 800 nm thick low-loss dual-layer LPCVD SiN optical waveguides with tunable profile shape to engineer modal properties. We achieved <10 dB/m loss at 1550 nm wavelength and nearly lossless vertical transitions between waveguides.

© 2021 The Author(s)

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More Like This
Bragg Reflector Co-integrated with SiN and a-Si on 300 mm Wafers for Low Loss Optical Beamformers

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SM4G.6 CLEO: Science and Innovations (CLEO:S&I) 2022

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