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Conferences > CLEO_SI > 2023 > STh1J > STh1J.2

Low Stress Bilayer LPCVD-PECVD SiN Waveguides for Kerr Frequency Comb Generation

Karl J. McNulty, Xingchen Ji, Andres Gil-Molina, Mateus Corato-Zanarella, Gaurang R. Bhatt, Ipshita Datta, Shriddha Chaitanya, Yoshitomo Okawachi, Alexander L. Gaeta, and Michal Lipson

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Abstract

We demonstrate a foundry-compatible platform based on bilayer LPCVD-PECVD SiN waveguides. Using microrings fabricated from our bilayer waveguide, we show a Kerr soliton frequency comb spanning 300 nm with 125 mW of pump power.

© 2023 The Author(s)

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