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Conferences > CLEO_SI > 2021 > SF2A > SF2A.4

Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion and Broadband Kerr Microcombs in the Near-Visible

Gregory Moille, Daron Westly, Edgar F. Perez, Ashutosh Rao, Xiyuan Lu, and Kartik Srinivasan

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Abstract

We consider the impact of precursor gas ratio on nominally stoichiometric silicon nitride films, and show how it has a significant impact on microresonator integrated dispersion and broadband comb generation in the near-visible.

© 2021 The Author(s)

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