Abstract
We demonstrate silicon nitride waveguides with <0.1 and 0.3 dB/cm loss in nitride and fully integrated photonics wafers, respectively, by employing noble integration techniques while preserving the performance of the other devices of the platform.
© 2023 The Author(s)
PDF ArticleMore Like This
Nathan F. Tyndall, Dmitry A. Kozak, Marcel W. Pruessner, Peter G. Goetz, William S. Rabinovich, Todd. H. Stievater, Nicholas M. Fahrenkopf, and Alin Antohe
QTu4B.5 Quantum 2.0 (QUANTUM) 2022
Yusheng Bian, Javier Ayala, Colleen Meagher, Bo Peng, Michal Rakowski, Ajey Jacob, Karen Nummy, Andy Stricker, Zoey Sowinski, Asli Sahin, Abdelsalam Aboketaf, Shuren Hu, Ian Stobert, Kate Mclean, Louis Medina, Kevin Dezfulian, Brendan Harris, Subramanian Krishnamurthy, Thomas Houghton, Won Suk Lee, Massimo Sorbara, Dave Riggs, Ted Letavic, Anthony Yu, Ken Giewont, and John Pellerin
FW5D.2 Frontiers in Optics (FiO) 2020
Xinru Ji, Rui Ning Wang, Zheru Qiu, and Tobias J. Kippenberg
ce_8_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2023