Abstract

Microoptics is a fast expanding field showing huge potential in providing science and industry with small yet highly functional tools for light control at a micro-scale. One of the most promising technologies to produce such elements is 3D laser lithography (3DLL) as it enables fabrication of free-form 3D objects with resolution and surface roughness control down to nm level [1]. So far it was employed to create integrated functioning monolithic 3D microoptical elements on functional substrates for in such applications as spatial light control [2] or imaging [3].

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