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Conferences > OFT > 2023 > OM3B > OM3B.1
  • Optica Design and Fabrication Congress 2023 (IODC, OFT)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper OM3B.1

3D printed singlet and doublet microoptics by two-photon grayscale lithography

Leander Siegle, Simon Ristok, and Harald Giessen

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Abstract

3D printed complex microoptical components are created by two-photon grayscale lithography. We optimize their shape to achieve residual deviations of less than 100 nm and examine the optical performance, achieving a resolution of 645 lp/mm.

© 2023 The Author(s)

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