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  • 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper cm_6_4

Stitchless Support-Free Fabrication of Free-Form Micromechanical Structures Using Femtosecond Laser 3D Lithography

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Abstract

Femtosecond laser based 3D nanolithography is gaining popularity in huge variety of fields [1]. However, further improvements are needed to push it from laboratory level use into a wide spread adaptation. These include increasing fabrication throughput without sacrificing quality of a final product and making the most challenging, free-movable 3D structures easy to print.

© 2019 IEEE

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