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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper TUJ56

Measurements of file spatial and temporal variation of CF and CF2 in fluorocarbon/oxygen discharges

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Abstract

Laser spectroscopy of transient species in semiconductor processing plasmas has supplied useful information for unraveling the complex chemistry of these systems.1 Pulsed laser-induced fluorescence (LIF) offers high sensitivity for ground state species as well as excellent spatial and temporal resolution. These features are utilized in the present work.

© 1989 Optical Society of America

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