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Optica Publishing Group
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper WHH3

First optical spectra of the CF2Cl, CFCl2, and CCl3 radicate by resonance enhanced multiphoton ionization spectroscopy

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Abstract

The importance of the perhalogenated methyl radicals in atmospheric chemistry (ozone destruction)1 and semiconductor manufacturing (etching using halocarbons)2 has been demonstrated to a certain extent. The optical spectra of these species will provide a diagnostic tool which will further elucidate the roles these species play in the above processes. We report the optical spectra of the three radicals CF2Cl, CFCl2, and CCl3.

© 1989 Optical Society of America

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