Abstract

We experimentally demonstrate a 4-stage and an 8-stage Ge/Si distributed traveling-wave photodetectors (TWPDs) with high RF output powers and large bandwidths. The genetic algorithm is utilized to synergistically optimize multiple relevant design parameters, including the dimension of the coplanar waveguide electrode and the aperiodic arrangement of the PD array. After the genetic algorithm optimization, the 3dB bandwidth of the 4-stage TWPD is improved from 46 GHz to 54 GHz under the constraint that the bandwidth of the unterminated single PD element is 50 GHz. Meanwhile, the 3dB bandwidth of the 8-stage TWPD is improved from 33 GHz to 40 GHz. A good agreement between measured and calculated frequency responses is obtained. The measured maximum RF output powers of the aperiodic 4-stage and 8-stage TWPDs at 30 GHz are 2.5 dBm and 6.3 dBm, respectively. Furthermore, the effectiveness of our design methodology is verified by measurement results of devices fabricated at different silicon photonics foundries.

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