Abstract

The optical constants of gold deposited on 300-nm-thick freestanding polyimide films have been measured in the energy range of 40–1350 eV. The optical constants of the polyimide films were known from a previous investigation. By performing both transmission measurements with Kramers–Kronig analysis and multiangle reflection measurements with analysis by fitting to a Fresnel multilayer model including roughness, one could carry out a detailed error analysis. In the energy range above 500 eV systematic deviations between the results obtained by both methods were found. For gold films the discrepancies can be attributed to deviations from Beckmann-type behavior at small grazing-incidence angles.

© 1994 Optical Society of America

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