Abstract

Angular-dependent reflectivity was measured with a dynamic range of 5–6 orders of magnitude at ∼20 different photon energies in the range from 40 to 800 eV with the HASYLAB reflectometer with synchrotron radiation. Several float-glass substrates and a number of sputtered Ni and C films were investigated to improve the accuracy. The optical constants were obtained from least-squares fits of theoretical reflectivity curves, taking into account the influence of film thicknesses and surface and interface roughnesses. All samples with Ni and C films were produced on float-glass substrates, with Ar as the sputter gas, in the low-pressure triode-assisted sputtering facility of the Sincrotrone Trieste.

© 1997 Optical Society of America

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