Abstract

The optical constants, δ = 1 − n and k, of very thin gold films have been determined from the reflectance data obtained in the soft x-ray region of 60–900 eV. The gold films were prepared to various thicknesses, d = 49 − 270 Å, by ion beam sputtering (IBS) and electron beam evaporation (EB). A plane parallel slab model with due considerations for the surface and the interface roughness was employed to analyze the reflectance data by least-squares curve fitting. The optical constants determined for the BS samples definitely show their dependence on the film thickness. It is also found that δ of the 201-Å thick IBS film is smaller by ~10% than that of the EB film of 212 Å thick.

© 1991 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements

Jianlin Cao, Mihiro Yanagihara, Masaki Yamamoto, Yoshinori Goto, and Takeshi Namioka
Appl. Opt. 33(10) 2013-2017 (1994)

Optical constants of gold in the soft-x-ray region from reflection and transmission measurements

R. Wolf, H.-G. Birken, C. Blessing, and C. Kunz
Appl. Opt. 33(13) 2683-2694 (1994)

Optical constants of float glass, nickel, and carbon from soft-x-ray reflectivity measurements

I. Diel, J. Friedrich, C. Kunz, S. Di Fonzo, B. R. Müller, and W. Jark
Appl. Opt. 36(25) 6376-6382 (1997)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription