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Fabrication of Polymer Optical Waveguide-Based Mach-Zehnder Interferometer Microsensors for Integrated Optofluidic Biodetection

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Abstract

We demonstrate an integrated optofluidic chip with polymer optical Mach-Zehnder interferometer microsensors. A digital ultraviolet lithography is applied to fabricate high-quality polymer optical waveguide components and Mach-Zehnder interferometer microsensors for on-chip integrated label-free biodetection.

© 2023 The Author(s)

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