Abstract

We have performed several experiments^1,2,3 on the scattering of light from moderately rough surfaces in order to address the questions: how rough a surface can be usefully measured by light scattering? and what parameters of the surface roughness can be reliably measured? We obtained optical scattering results with an angular resolved scattering system called DALLAS⁴ (detector array for lasser light angular scattering) which uses a HeNe laser (λ=0.6328 μm) as the source of light. Measurements were performed on a number of surfaces with roughness (σ) ranging from about 0.02 μm to about 1 μm. The results were analyzed by different methods depending on the rms roughness and compared with the results of stylus measurements.

© 1992 Optical Society of America