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Optica Publishing Group
  • Quantum Electronics and Laser Science Conference
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper WDD43

Excimer laser-material interaction: characterization of the blowoff plasma

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Abstract

The interaction of an excimer laser with an aluminum surface was studied by a characterization of the blowoff plasma plume. The SDIO/MLI 2-m laser, operating at XeF and KrF wavelengths, was used to illuminate millimeter sized spots on aluminum targets in vacuum at fluences of 400–1250 J/cm2 for 1.8 μs.

© 1989 Optical Society of America

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