Complex-Grid Ion-Source and Ion-Beam-Assisted Deposition of the Films

Chen Xing-Yi

doi:10.1364/OIC.1988.ThB6

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper ThB6
•https://doi.org/10.1364/OIC.1988.ThB6

Complex-Grid Ion-Source and Ion-Beam-Assisted Deposition of the Films

Chen Xing-Yi

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
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Deposition Techniques: 1 (ThB)

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C. Xing-Yi, "Complex-Grid Ion-Source and Ion-Beam-Assisted Deposition of the Films," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper ThB6.

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Abstract

The work reported here is an investigation of the construction and propeties of a complex-grid ion-source. The operation of such a source is also described. Using an ion-beam-assisted deposition process with our complex-grid ion-source, we have manufactured some high quality films.

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