Abstract

Low-loss semiconductor waveguide components are essential for integrating guided-wave optical components with other optoelectronic devices. Trade-offs between fabrication-related scattering loss and bend radiation loss will determine the smallest size practical for semiconductor integrated-optic devices. Rib waveguides with tight optical confinement (small mode size, large index differences) are required for compact bends but are more susceptible to fabrication-induced scattering loss from rough surfaces. An understanding of how rib geometry affects scattering would provide a valuable tool to optimize guide performance. Although scattering in 1-D planar guides has been extensively investigated theoretically,^1,2 a complete model for 2-D rib guides is not available.

© 1988 Optical Society of America