Abstract

Dimethylgold (III) acetylacetonate and its fluorinated derivatives are ideal precursors for the deposition of gold. Thermal decomposition from the vapor phase allows high quality metal to be produced. A comparison of the gold complex utilized and the overall rates of deposition are highlighted; the presence of fluorine substituents in the complex causes an increase in the complex vapor pressure and in the observed rates of gold deposition.

© 1986 Optical Society of America