Abstract

Diamond was grown under ultraviolet (UV) irradiation by the hot filament-assisted chemical vapor deposition method (HFCVD), and the effects of UV irradiation, carbon sources and substrate materials on diamond growth rate were investigated. Diamond growth was promoted by UV irradiation in all reactant systems tested over a temperature range of 400-800° C, and was strongly influenced by gaseous carbon sources. Acetone and ethylene were especially effective in enhancing the diamond growth. Transition metal substrates such as molybdenum and tantalum promoted the growth rate.

© 1995 Optical Society of America