We demonstrate high-confinement Si3N4 resonators with intrinsic quality factor more than 1 million using standard PECVD process. We show that by addressing scattering, the loss at 1.6 μm can be as low as 0.4 dB/cm.
© 2019 The Author(s)
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
Login to access OSA Member Subscription