Abstract
We demonstrate high-confinement Si3N4 ring resonators with a quality factor of 15.6 million. We show that ultra-high quality factors are achievable by using a process that addresses surface roughness on all interfaces of the waveguides.
© 2016 Optical Society of America
PDF ArticleMore Like This
Xingchen Ji, Samantha P. Roberts, and Michal Lipson
SM2O.6 CLEO: Science and Innovations (CLEO:S&I) 2019
Daryl T. Spencer, Michael L. Davenport, Tin Komljenovic, Sudharsanan Srinivasan, and John E. Bowers
SM4G.2 CLEO: Science and Innovations (CLEO:S&I) 2016
Sangsik Kim, Kyunghun Han, Jose A. Jaramillo-Villegas, Xiaoxiao Xue, Yi Xuan, Andrew M. Weiner, and Minghao Qi
STu4Q.4 CLEO: Science and Innovations (CLEO:S&I) 2016