Flexible Crystalline Silicon Nanomembrane Photonic Crystal Microcavity

Xiaochuan Xu; Xiaochuan Xu; Harish Subbaraman; Amir Hosseini; Swapnajit Chakravarty; Ray T. Chen

doi:10.1364/CLEO_SI.2014.SW1M.6

CLEO: 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper SW1M.6
•https://doi.org/10.1364/CLEO_SI.2014.SW1M.6

Flexible Crystalline Silicon Nanomembrane Photonic Crystal Microcavity

Xiaochuan Xu, Harish Subbaraman, Amir Hosseini, Swapnajit Chakravarty, and Ray T. Chen

CLEO: Science and Innovations 2014

San Jose, California United States
8–13 June 2014
ISBN: 978-1-55752-999-2

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Micro and Nanophotnic Devices (SW1M)

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X. Xu, H. Subbaraman, A. Hosseini, S. Chakravarty, and R. T. Chen, "Flexible Crystalline Silicon Nanomembrane Photonic Crystal Microcavity," in CLEO: 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper SW1M.6.

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Abstract

We for the first time demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity, which shows a quality factor of 22000 and could be bent to a radius of 5 mm.

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