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Conferences > CLEO_SI > 2014 > SW1M > SW1M.5

Heterogeneously Integrated MIR silicon photonics

Yu Chen, Hongtao Lin, Juejun Hu, and Mo Li

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Abstract

By utilizing heterogeneous integration method, integrated silicon photonics on mid-IR compatible substrate has been fabricated and on-chip cavity-enhanced mid-IR spectroscopic analysis of organic chemicals has been demonstrated.

© 2014 Optical Society of America

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