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Conferences > CLEO_SI > 2015 > SF2H > SF2H.3

Bending Behavior of Flexible Crystalline Silicon Nanomembrane Photonic Crystal Microcavities

Xiaochuan Xu, Harish Subbaraman, Swapnajit Chakravarty, and Ray T. Chen

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Abstract

We demonstrated a flexible crystalline silicon nanomembrane photonic crystal microcavity with a quality factor of 22,000 and experimentally studied its bending behavior.

© 2015 Optical Society of America

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