Abstract
Lithium niobate is a material of high interest for the fabrication of photonic elements like waveguides, splitters or switching devices because of its large nonlinear and electro-optical coefficient. The fabrication of photonic crystal structures requires a method which ensures a high accuracy. Micro machining of lithium niobate is a difficult task because of its resistance against standard pattering techniques like reactive ion etching. Several modified or alternative processes like etching in proton exchanged lithium niobate1 or Focused Ion Beam Milling2 have been used. However, the use of this techniques results in tilted sidewalls which influence the optical properties of the photonic band gap structure.
© 2007 IEEE
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