Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Low-loss ridge waveguides in thin film lithium niobate-on-insulator (LNOI) fabricated by reactive ion etching

Not Accessible

Your library or personal account may give you access

Abstract

We report on the fabrication of waveguides in 300 nm-thick Y-cut lithium niobate on silicon through optimized reactive ion etching, yielding sidewall roughness of 22.9 nm and propagation losses of 8.62 dB/cm at 1550 nm.

© 2016 Optical Society of America

PDF Article
More Like This
Wafer-scale fabrication of low-loss waveguides in lithium niobate on insulator (LNOI) integrated photonics platform

Jacopo Leo, Mozhgan Hayati, Farnaz Ebrahimi Agri, Zyad Haddad, Gregory Choong, Yves Petremand, Ivan Prieto, Olivier Dubochet, Michel Despont, Hamed Sattari, and Amir Ghadimi
Mo3F.4 European Conference and Exhibition on Optical Communication (ECOC) 2022

Waveguide Gratings in Thin-Film Lithium Niobate on Insulator

Mohammad Amin Baghban, Jean Schollhammer, Carlos Errando-Herranz, Kristinn B. Gylfason, and Katia Gallo
CK_2_6 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2017

High-Q thin film lithium niobate microrings fabricated with wet etching

Rongjin Zhuang, Jinze He, Haifeng Hu, Yifan Qi, Lihua Xu, Weiguo Chu, and Yang Li
SM2H.1 CLEO: Science and Innovations (CLEO:S&I) 2023

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved