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Conferences > CLEOPR > 2013 > TuPI > TuPI_5
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuPI_5

InP Heterostructure Photonic Crystal Waveguide Fabricated by High-aspect-ratio ICP Etching

Kaiyu Cui, Yongzhuo Li, Xue Feng, Fang Liu, Yidong Huang, and Wei Zhang

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Abstract

InP heterostructure photonic crystal waveguide (PCW) is fabricated by ICP etching with high-aspect-ratio of 45. Structure-dependent transmission-dip about 17dB and micro-photoluminescence linewidth of only 73nm are demonstrated in a 17-μm-long heterostructure PCW.

© 2013 IEICE

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