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Towards low-loss monolithic silicon and nitride photonic building blocks in state-of-the-art 300mm CMOS foundry

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Abstract

We review recent progress in loss reduction of Si and SiN waveguides in GLOBALFOUNDRIES 300mm monolithic Si photonics platform. Primary challenges to creating low-loss CMOS integrated photonic components are highlighted and potential solutions are outlined.

© 2020 The Author(s)

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