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Conferences > CLEO_AT > 2023 > AM4M > AM4M.6

Deep Subwavelength Slotted Photonic Crystals Fabricated in a Monolithic Silicon Photonics Technology

Kellen P. Arnold, Joshua A. Allen, Sami I. Halimi, Landen D. Ryder, Francis O. Afzal, Yusheng Bian, Abdelsalam Aboketaf, Kevin Dezfulian, Michal Rakowski, Rod Augur, Takako Hirokawa, Karen Nummy, and Sharon M. Weiss

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Abstract

We report deep subwavelength-engineered slotted photonic crystal nanobeams with minimum features <70 nm fabricated using a 90 nm monolithic silicon photonics technology at GlobalFoundries. This work enables potential for scalable, advanced integrated photonics applications.

© 2023 The Author(s)

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