Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding

Minmin You; Zhu Xiantao; Zhu Xiantao; Jingquan Liu

doi:10.1364/CLEO_AT.2023.AM4M.5

CLEO 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper AM4M.5
•https://doi.org/10.1364/CLEO_AT.2023.AM4M.5

Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding

Minmin You, Zhu Xiantao, and Jingquan Liu

CLEO: Applications and Technology 2023

San Jose, CA United States
7–12 May 2023
ISBN: 978-1-957171-25-8

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Integrated Photonics (AM4M)

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M. You, Z. Xiantao, and J. Liu, "Modulated temperature sensitivity based on silicon ring resonators with titanium dioxide cladding," in CLEO 2023, Technical Digest Series (Optica Publishing Group, 2023), paper AM4M.5.

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Abstract

We investigated the temperature dependence of silicon ring resonators deposited TiO₂ cladding. It was experimentally demonstrated that temperature sensitivity can be greatly modulated from 7.68 pm/K to 51.95 pm/K by varying width of waveguide from 330 nm to 390 nm.

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