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  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThA2_3

Effects of Interruption on Surface Morphology for InAs/GaAs Quantum Dots' Growth

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Abstract

Kinetic Monte Carlo simulations are applied on the epitaxial growth of self-assembled InAs quantum dots on GaAs substrate with periodic strain-relief patterns. We demonstrate that uniformly sized and regularly ordered island arrays can be obtained by controlling interruption time at the first sub-monolayer stage.

© 2007 IEEE

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