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Conferences > CLEOPR > 2001 > TuB1 > TuB1_1
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuB1_1

High Resolution Micromachining Using Short Wavelength and Short Pulse Lasers*

J Cashmore, M Gower, P Gruenewald, D Karnakis, N Rizvi, and M Whitfield

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Abstract

High-resolution micromachining of a range of materials (polymers, fused silica, silicon, diamond) has been investigated using both short wavelength (157nm, F2) and short (l00fsec, Ti:Al2O3) pulse laser radiation. Results using the two sources will be compared.

© 2001 IEEE

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