Abstract
We have developed and demonstrated a diode pumped solid state laser which produces 350 mJ per pulse in a 10 ns pulse length and currently runs at 650 Hz with near diffraction limited beam quality. The laser was primarily built to be a plasma driver producing x-rays at 130A for a projection lithography system. Numerous additional applications are anticipated for this state-of-the-art system including material processing at the fundamental wavelength and frequency tripling for applications requiring UV output.
© 1995 IEEE
PDF ArticleMore Like This
Mark Hermann, John Honig, and Lloyd Hackel
CTuC5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1995
Lloyd A. Hackel, C. Brent Dane, Mark R. Hermann, and Luis E. Zapata
WA.6 Soft X-Ray Projection Lithography (SXRAY) 1993
Luis E. Zapata, Raymond J. Beach, C. Brent Dane, Patrick Reichert, and Lloyd A. Hackel
CThC4 Conference on Lasers and Electro-Optics (CLEO:S&I) 1994