Abstract

There are a number of ongoing programs, teaming LLNL and industry, directed toward commercial applications of diode-pumped solid-state lasers (DPSSLs). Several programs, including direct optical lithography in the near UV, extreme-ultraviolet lithography (EUVL), and materials processing, share similar goals: demonstrating key solid-state laser technologies required for advanced manufacturing tools. These all share similar laser requirements. Specifically, the laser source must be capable of simultaneously producing high average power (300 to 500 W) at high repetition rates (700 Hz to 1.3 kHz) with high beam quality (less than several times the diffraction limit), good pointing stability, and pulse widths varying from (~10 ns to 1 μs).

© 1995 Optical Society of America