Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO > 2004 > CThD > CThD1
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CThD1

New low temperature poly-silicon fabrication technique by near infrared femto-second laser annealing

Yi-Chao Wang, Alexei K. Zaitsev, Ci-Ling Pan, and Jia-Min Shieh

Not Accessible

Your library or personal account may give you access

Abstract

Combining ultrafast Ti:sapphire laser pulses and the sequential lateral solidification technique, we achieved films with large grains, wide laser-fluence window, at lower temperatures, than conventional annealing methods.

© 2004 Optical Society of America

PDF Article
More Like This
New low temperature femto-second laser annealing method for TFT fabrication technology

Alexei K. Zaitsev, Yi-Chao Wang, Ci-Ling Pan, and Jia-Min Shieh
CThM34 Conference on Lasers and Electro-Optics (CLEO:S&I) 2003

Near-infrared Femtosecond Laser-Processed Thin-Film Transistor

Zun-Hao Chen, Jia-Min Shieh, Bau-Tong Dai, Yi-Chao Wang, and Ci-Ling Pan
CFG7 Conference on Lasers and Electro-Optics (CLEO:S&I) 2005

Laser Annealing of Low Temperature Deposited Silicon Waveguides

Y. Franz, A. F. J. Runge, S. Z. Oo, N. Healy, G. Martinez-Jimenez, A. Z. Khokhar, A. Tarazona, H. M. H. Chong, S. Mailis, and A. C. Peacock
SM3K.4 CLEO: Science and Innovations (CLEO:S&I) 2017

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use