Abstract
The phase velocities in coplanar transmission lines on Si-on-sapphire (SOS) substrates had been studied by Frankel et al.1 In their work, the sapphire layer was 430-μm thick. In ICs, however, the interconnections are buried in thin SiO2 layers with typical thicknesses of 1 to 2 μm. Therefore, the delay of these lines are quite different from those on SOS substrates. In this work, we have studied the phase velocities of coplanar strip (CPS) transmission lines on Si/SiO2/Si multilayer substrates. Because the top Si layer of the substrate is very thin, the phase velocity measured in our experiments should be close to that in ICs.
© 1996 Optical Society of America
PDF ArticleMore Like This
Rui Wu, Bo Su, Jiahui Wang, Jingsuo He, Shengbo Zhang, and Cunlin Zhang
WI21 International Symposium on Ultrafast Phenomena and Terahertz Waves (ISUPTW) 2018
U. D. Keil, D. R. Dykaar, A. F. J. Levi, R. F. Kopf, L. N. Pfeiffer, K. W. Goossen, S. B. Darack, and K. W. West
H2 Ultrafast Electronics and Optoelectronics (UEO) 1993
F. Rahmatian, A. Kulpa, N.A.F. Jaeger, R. James, M. Bégin, H.R. Khazaei, E. Berolo, and F. Gannouchi
CThI9 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 1996