Abstract
Subpicosecond electrical transients can be propagated for short distances (≈100 μm) with Little or no loss in fidelity.1−4 However, there has been no attempt to improve the speed of these transmission lines, that is, the actual time required for the signal to propagate. We report a practical method for fabricating ultrafast coplanar- air transmission (CAT) Enes in which the bulk of the substrate dielectric is removed immediately in and around the edges of the conductors resulting in a nearly uniform air dielectric. This is shown schematically in the inset in Fig. I. CAT lines from 5 μm < W < 50 μm wide are formed on semi-insulating InP substrates by evaporating Au lines 1000 nm thick and then an overlayer etch mask of SiO2. After using HC1 to etch the InP substrate, the SiO2 layer is removed.
© 1990 Optical Society of America
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