Abstract

The laser laboratory at TRINITI has been developing excimer lasers since 1978. The main results of our research3 ensured success in the creation in 1990 of a XeCl laser with a pulse energy of 10 J at a pulse repetition rate of 100 Hz.2 Afterwards, SOPRA attained 1 kW of average power from the XeCl laser.3

© 1995 Optical Society of America

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References

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