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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper THP3

Beam cleanup by stimulated Brillouin scattering phase conjugation for a KrF laser at high repetition rate

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Abstract

A narrowband KrF laser with high beam quality and a repetition rate is a key device for precision micromachining. Our recent work shows that even an injection seeded narrowband KrF laser produces a beam stability which is not satisfactory for those purposes.1,2

© 1989 Optical Society of America

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